Customized solutions for force & deformation sensing
The deformation of small silicon structures is measured
by means of small piezo-resistive strain gauges. These structures can
be beams (to measure forces), or membranes (for a pressure sensor). For
an accurate detection of forces and deformations, the design of the suspension
beams and the strain gauges, is essential. Measurement of deformations
in three directions is feasible.
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