Using micro machining of silicon, movable and deformable mirror devices are fabricated and coated with reflective layers. Electrostatic actuators can be combined with piezo-resistive detectors. Frequency and size can vary. The technology allows large arrays and matrices.

Typical Specifications

• Dimensions: from µm to cm
• Deflections: variable
• Frequency: kHZrange
• Temperature: up to 150 C

Typical Applications

• Telecommunications
• Satellites
• Detectors
• Screens