Different micro valves have been designed and fabricated for several applications:

• bi-stable valve for biomedical application with a rubber membrane
• Gas valve channel array for microGC injector
• Pneumatic valve for automation (silicon with metal)

Actuation principles are electrostatic, inductive, magnetic, or pneumatic. Membrane materials are silicon or polymers. The valves can be targeted for fluids or gasses.

Using our microDELTA™ fluidic integration platform, systems with channels and valve arrays are hybridly integrated in a flexible low-cost way. In this way, a system with a high density of valves with integrated connections becomes feasible.